Madou, Marc J. <br/><br/>
Fundamentals of microfabrication :  the science of miniaturization / 
Marc J. Madou 
 - 2nd ed. 
 - Boca Raton :  CRC Press,  c2002 
 - 723 p. :  ill. ;  29 cm. 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>0849308267 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Integrated circuits--Design and construction<br/>Microelectromechanical systems--Design and construction<br/>Machining<br/>Microelectronic packaging<br/>Lasers