TY  - BOOK
AU  - Madou,Marc J.
TI  - Fundamentals of microfabrication: the science of miniaturization 
SN  - 0849308267
PY  - 2002///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectronics
KW  - Integrated circuits
KW  - Design and construction
KW  - Microelectromechanical systems
KW  - Machining
KW  - Microelectronic packaging
KW  - Lasers
N1  - Includes bibliographical references and index
ER  -