@book{33981,
	author = {Santos, Héctor J. de los},
	title = {Principles and applications of NanoMEMS physics /},
	publisher = {Springer,},
	year = {c2005},
	address = {Dordrecht, The Netherlands :},
	url = {http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html}
}