Santos, Héctor J. de los <br/><br/>
Principles and applications of NanoMEMS physics / 
by Héctor J. De Los Santos 
 - Dordrecht, The Netherlands :  Springer,  c2005 
 - xv, 254 p. :  ill. ;  25 cm. 
 - Microsystems ;  15 .
<br/><br/>Includes bibliographical references (p. [241]-252) and index 
<br/><br/><label>ISBN: </label>1402032382 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Quantum electronics<br/>Wave-particle duality<br/>Nanotechnology<br/>Microelectromechanical systems