01093nam a2200277 a 4500 vtls000019663 KUKTEM 20251117144325.0 070427 000 0 eng d 1402032382 201107131914 VLOAD 200908141319 VLOAD 200908141250 VLOAD 200908131703 VLOAD 200704271459 farina UMP QC688 .S28 2005 Santos, Héctor J. de los Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos Dordrecht, The Netherlands : Springer, c2005 xv, 254 p. : ill. ; 25 cm. Microsystems ; 15 Includes bibliographical references (p. [241]-252) and index Quantum electronics Wave-particle duality Nanotechnology Microelectromechanical systems http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html 0 0 0 0 10000 10000 2019-09-04 0 QC688 .S28 2005 0000022909 2019-09-04 00:00:00 1 2019-09-04 OPEN VIRTUA 33981 33987 VTLSSORT0080*0200*0900*1000*2450*2600*3000*4400*5040*6500*6501*6502*6503*8560*9991