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  <titleInfo>
    <title>Principles and applications of NanoMEMS physics</title>
  </titleInfo>
  <name type="personal">
    <namePart>Santos, Héctor J. de los</namePart>
    <role>
      <roleTerm authority="marcrelator" type="text">creator</roleTerm>
    </role>
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  <typeOfResource>text</typeOfResource>
  <originInfo>
    <place>
      <placeTerm type="text">Dordrecht, The Netherlands</placeTerm>
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    <publisher>Springer</publisher>
    <dateIssued>c2005</dateIssued>
    <issuance>monographic</issuance>
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  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
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  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>xv, 254 p. : ill. ; 25 cm.</extent>
  </physicalDescription>
  <note type="statement of responsibility">by Héctor J. De Los Santos</note>
  <note>Includes bibliographical references (p. [241]-252) and index</note>
  <subject authority="lcsh">
    <topic>Quantum electronics</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Wave-particle duality</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Nanotechnology</topic>
  </subject>
  <subject authority="lcsh">
    <topic>Microelectromechanical systems</topic>
  </subject>
  <relatedItem type="series">
    <titleInfo>
      <title>Microsystems ; 15</title>
    </titleInfo>
  </relatedItem>
  <identifier type="isbn">1402032382</identifier>
  <identifier type="uri">http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html</identifier>
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