TY  - BOOK
AU  - Santos,Héctor J.de los
TI  - Principles and applications of NanoMEMS physics
SN  - 1402032382
PY  - 2005///
CY  - Dordrecht, The Netherlands
PB  - Springer
KW  - Quantum electronics
KW  - Wave-particle duality
KW  - Nanotechnology
KW  - Microelectromechanical systems
N1  - Includes bibliographical references (p. [241]-252) and index
UR  - http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html
ER  -