01056nam a2200205 a 4500001001400000003000700014005001700021008004100038020001500079020001800094040000800112245010100120260003300221300002900254500009300283505041200376650002100788650001900809700002200828vtls000021866KUKTEM20251117144357.0071028s2007    ne     f      001 0 eng|d  a1402059485  a9781402059483  aUMP00aMicromanufacturing :binternational research and development /cby Kornel F. Ehmann ... [et al.]  aDordrecht :bSpringer,c2007  a362 p. :bill. ;c25 cm.  aCover title:  Micromanufacturing : international  assessment of research and development  aIntroduction / Richard E. DeVor and Kornel F. Ehmann --  Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David    Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc  Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J.  Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson. 0aMicrofabrication 0aMicromachining1 aEhmann, Kornel F.