international research and development Ehmann, Kornel F. text ne Dordrecht Springer 2007 monographic eng

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362 p. : ill. ; 25 cm. Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson. specialized by Kornel F. Ehmann ... [et al.] Cover title: Micromanufacturing : international assessment of research and development Microfabrication Micromachining 1402059485 9781402059483 UMP 071028 20251117144357.0 vtls000021866