TY  - BOOK
AU  - Ehmann,Kornel F.
TI  - Micromanufacturing: international research and development 
SN  - 1402059485
PY  - 2007///
CY  - Dordrecht
PB  - Springer
KW  - Microfabrication
KW  - Micromachining
N1  - Cover title:  Micromanufacturing : international  assessment of research and development; Introduction / Richard E. DeVor and Kornel F. Ehmann --  Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David    Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc  Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J.  Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson
ER  -