Smart sensors and MEMS / 
edited by Sergey Y. Yurish and Maria Teresa S.R. Gomes 
 - Dordrecht :  Kluwer Academic,  2004 
 - 480 p. :  ill., ports. ;  25 cm. 
<br/><br/><label>ISBN: </label>1402029284 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Detectors<br/>Microelectromechanical systems<br/>Scanning systems