TY  - BOOK
AU  - Yurish,Sergey Y.
AU  - Gomes,Teresa S.R.
TI  - Smart sensors and MEMS
SN  - 1402029284
PY  - 2004///
CY  - Dordrecht
PB  - Kluwer Academic
KW  - Detectors
KW  - Microelectromechanical systems
KW  - Scanning systems
ER  -