MEMS mechanical sensors / 
Stephen Beeby ... [et al.] 
 - Boston :  Artech House,  2004 
 - 269 p. :  ill. ;  26 cm. 
 - Microelectromechanical systems series .
<br/><br/><label>ISBN: </label>1580535364 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Detectors