00584nam a2200193 a 4500001001400000003000700014005001700021008004100038020001500079040000800094245005800102260003400160300002900194440004200223650003500265650001400300700001900314856005700333vtls000022219KUKTEM20251117144423.0071112s2004    mau    f      001 0 eng|d  a1580535364  aUMP00aMEMS mechanical sensors /cStephen Beeby ... [et al.]  aBoston :bArtech House,c2004  a269 p. :bill. ;c26 cm. 0aMicroelectromechanical systems series 0aMicroelectromechanical systems 0aDetectors1 aBeeby, Stephen42ahttp://www.loc.gov/catdir/toc/fy0611/2004046158.html