TY  - BOOK
AU  - Graf,M.
TI  - CMOS hotplate chemical microsensors
SN  - 9783540695615
PY  - 2007///
CY  - Berlin, New York
PB  - Springer
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - Microfabrication
N1  - Includes bibliographical references (p. 113-121) and index
ER  -