Advances in micro/nano electromechanical systems and fabrication technologies / 
edited by Kenichi Takahata 
 - Rijeka, Croatia :  INTECH,  2014 
 - vi, 226 p. :  ill. ;  23 cm. 
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>9789535110859 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Fabrication<br/>Manufacturing processes