TY  - BOOK
AU  - Takahata,Kenichi
TI  - Advances in micro/nano electromechanical systems and fabrication technologies
SN  - 9789535110859
PY  - 2014///
CY  - Rijeka, Croatia
PB  - INTECH
KW  - Fabrication
KW  - Manufacturing processes
N1  - Includes bibliographical references
ER  -