Advanced Metallization Conference 2009 (AMC 2009) :  proceedings of the Conference held October 13-15, 2009, Baltimore, Maryland, U.S.A. / 
 AMC 2009 
editors: Daniel C. Edelstein, Stefan E. Schulz 
 - Warrendale, Pa. :  Materials Research Society,  c2010 
 - xiii, 295  p. :  ill. ;  24 cm. 
 - Materials Research Society conference proceedings .
 - Materials Research Society conference proceedings .
<br/><br/> "This Conference is affiliated with the Materials Research Society and sponsored by the Department of Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." -- t.p. 
<br/><br/>Includes bibliographical references and indexes 
<br/><br/><label>ISBN: </label>9781605112183 1605112186 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors--Design and construction--Congresses<br/>Integrated circuits--Ultra large scale integration--Design and construction--Congresses<br/>Integrated circuits--Ultra large scale integration--Materials--Congresses<br/>Thin films--Congresses<br/>Metallic films--Congresses<br/>Metallizing--Congresses