01609nam a2200325 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112111003800120245019100158246001300349260005800362300003600420490005400456500023100510504005200741650005600793650009200849650007800941650002701019650003101046650002801077700002501105700002201130710007701152830005401229vtls000060037KUKTEM20251117144532.0120522t2010    paua   f b    101 0 eng d  a9781605112183  a1605112186  aUMP2 aAdvanced Metallization Conference10aAdvanced Metallization Conference 2009 (AMC 2009) :bproceedings of the Conference held October 13-15, 2009, Baltimore, Maryland, U.S.A. /ceditors: Daniel C. Edelstein, Stefan E. Schulz30aAMC 2009  aWarrendale, Pa. :bMaterials Research Society,cc2010  axiii, 295  p. :bill. ;c24 cm.1 aMaterials Research Society conference proceedings  a"This Conference is affiliated with the Materials Research Society and sponsored by the Department of Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." -- t.p.  aIncludes bibliographical references and indexes 0aSemiconductorsxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxDesign and constructionvCongresses 0aIntegrated circuitsxUltra large scale integrationxMaterialsvCongresses 0aThin filmsvCongresses 0aMetallic filmsvCongresses 0aMetallizingvCongresses1 aEdelstein, Daniel C.1 aSchulz, Stefan E.2 aUniversity of California, Berkeley.bContinuing Education in Engineering 0aMaterials Research Society conference proceedings