01911nam a2200373 a 4500 vtls000060037 KUKTEM 20251117144532.0 120522t2010 paua f b 101 0 eng d 9781605112183 1605112186 201710021127 AUTHORITY 201209051557 fauzi 201205221542 safura UMP TK7871.85 .A38 2010 Advanced Metallization Conference Advanced Metallization Conference 2009 (AMC 2009) : proceedings of the Conference held October 13-15, 2009, Baltimore, Maryland, U.S.A. / editors: Daniel C. Edelstein, Stefan E. Schulz AMC 2009 Warrendale, Pa. : Materials Research Society, c2010 xiii, 295 p. : ill. ; 24 cm. Materials Research Society conference proceedings "This Conference is affiliated with the Materials Research Society and sponsored by the Department of Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." -- t.p. Includes bibliographical references and indexes Semiconductors Design and construction Congresses Integrated circuits Ultra large scale integration Design and construction Congresses Integrated circuits Ultra large scale integration Materials Congresses Thin films Congresses Metallic films Congresses Metallizing Congresses Edelstein, Daniel C. Schulz, Stefan E. University of California, Berkeley. Continuing Education in Engineering Materials Research Society conference proceedings 0 0 0 0 20000 20000 2019-09-04 321.99 0 TK7871.85 .A38 2010 0000066524 2019-09-04 00:00:00 1 321.99 2019-09-04 OPEN VIRTUA40 38300 38306 VTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*4900*5000*5040*6500*6501*6502*6503*6504*6505*7000*7001*7100*8300*9992