TY  - BOOK
AU  - Edelstein,Daniel C.
AU  - Schulz,Stefan E.
ED  - Advanced Metallization Conference
ED  - University of California, Berkeley.
TI  - Advanced Metallization Conference 2009 (AMC 2009): proceedings of the Conference held October 13-15, 2009, Baltimore, Maryland, U.S.A. 
T2  - Materials Research Society conference proceedings
SN  - 9781605112183
PY  - 2010///
CY  - Warrendale, Pa.
PB  - Materials Research Society
KW  - Semiconductors
KW  - Design and construction
KW  - Congresses
KW  - Integrated circuits
KW  - Ultra large scale integration
KW  - Materials
KW  - Thin films
KW  - Metallic films
KW  - Metallizing
N1  - "This Conference is affiliated with the Materials Research Society and sponsored by the Department of Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." -- t.p; Includes bibliographical references and indexes
ER  -