Hsu, Tai-Ran. <br/><br/>
MEMS and microsystems :  design, manufacture, and packaging / 
Tai-Ran Hsu. 
 - 2nd ed. 
 - Hoboken, NJ :  John Wiley,  c2008. 
 - xxv, 550 p. :  ill. ;  24 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780470083017 (cloth) 
<br/><br/><label>LCCN: </label>2007-017041 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics.<br/>Microelectromechanical systems.<br/>Microelectronic packaging.