TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - MEMS and microsystems: design, manufacture, and packaging 
SN  - 9780470083017 (cloth)
PY  - 2008///
CY  - Hoboken, NJ
PB  - John Wiley
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip0716/2007017041.html
UR  - http://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html
ER  -