MEMS technology and devices :  Suntec, Singapore, 1-6 July 2007 / 
 MEMS technology and devices  Suntec, Singapore, 1-6 July 2007  [computer file]: 
Aiqun Liu ... [et al.] 
 - Singapore :  Hackensack, NJ :  Pan Stanford Pub. ;  Distributed by World Scientific Pub. Co.,  c2007. 
 - xv, 441 p. :  ill. ;  24 cm. +  1 computer disc 
<br/><br/> "ICMAT 2007 conference proceedings"--T.p. verso 
<br/><br/>Includes bibliographical references 
<br/><br/><label>ISBN: </label>9789812709608 (hbk.) 9812709606 (hbk.) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Congresses<br/>Nanostructured materials--Congresses