01280nam a2200277 a 4500 vtls000026876 KUKTEM 20251117144544.0 080423s2007 si a f b 001 0 eng d 9789812709608 (hbk.) 9812709606 (hbk.) 201108290858 Fida 201107132009 VLOAD 201006161144 ida 200908141430 VLOAD 200804231402 norsaini UMP TK7875 .I58 2007 International Conference on Materials for Advanced Technologies (2007 : Singapore) MEMS technology and devices : Suntec, Singapore, 1-6 July 2007 / Aiqun Liu ... [et al.] MEMS technology and devices [computer file]: Suntec, Singapore, 1-6 July 2007 Singapore : Pan Stanford Pub. ; Hackensack, NJ : Distributed by World Scientific Pub. Co., c2007. xv, 441 p. : ill. ; 24 cm. + 1 computer disc "ICMAT 2007 conference proceedings"--T.p. verso Includes bibliographical references Microelectromechanical systems Congresses Nanostructured materials Congresses Liu, Aiqun 0 0 0 0 20000 20000 2019-09-04 634.73 0 TK7875 .I58 2007 0000039733 2019-09-04 00:00:00 2 634.73 2019-09-04 OPEN c.2 0 0 0 0 20000 20000 2019-09-04 634.73 0 CD 3631 | TK7875 .I58 2007 0000039734 2019-09-04 00:00:00 2 634.73 2019-09-04 ACCOM c.2 0 0 0 0 20000 20000 2019-09-04 634.73 0 TK7875 .I58 2007 0000045959 2019-09-04 00:00:00 3 634.73 2019-09-04 OPEN c.3 0 0 0 0 20000 20000 2019-09-04 634.73 0 CD 4318 | TK7875 .I58 2007 0000045960 2019-09-04 00:00:00 3 634.73 2019-09-04 ACCOM 0 0 0 0 10000 10000 2019-09-04 634.73 0 TK7875 .I58 2007 0000032286 2019-09-04 00:00:00 1 634.73 2019-09-04 OPEN 0 0 0 0 10000 10000 2019-09-04 634.73 0 CD 2866 | TK7875 .I58 2007 0000032287 2019-09-04 00:00:00 1 634.73 2019-09-04 ACCOM VIRTUA40 38699 38705 VTLSSORT0080*0200*0201*0400*0900*1110*2450*2460*2600*3000*5000*5040*6500*6501*7000*9991