TY  - BOOK
AU  - Liu,Aiqun
ED  - International Conference on Materials for Advanced Technologies
TI  - MEMS technology and devices: Suntec, Singapore, 1-6 July 2007 
SN  - 9789812709608 (hbk.)
PY  - 2007///
CY  - Singapore, Hackensack, NJ
PB  - Pan Stanford Pub., Distributed by World Scientific Pub. Co.
KW  - Microelectromechanical systems
KW  - Congresses
KW  - Nanostructured materials
N1  - "ICMAT 2007 conference proceedings"--T.p. verso; Includes bibliographical references
ER  -