Mahalik, Nitaigour Premchand <br/><br/>
MEMS / 
Nitaigour Premchand Mahalik 
 - New York :  McGraw-Hill ,  2008 
 - 500 p. :  ill. ;  25 cm. 
<br/><br/><label>ISBN: </label>0070634459 9780070634459 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems<br/>Microelectronics<br/>Nanotechnology