TY  - BOOK
AU  - Mahalik,Nitaigour Premchand
TI  - MEMS
SN  - 0070634459
PY  - 2008///
CY  - New York
PB  - McGraw-Hill
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Nanotechnology
ER  -