@book{40054,
	author = {Baglio, S and Castorina, Salvatore.},
	title = {Scaling issues and design of MEMS /},
	publisher = {John Wiley & Sons,},
	year = {c2007.},
	address = {Chichester, West Sussex, England ;},
	note = {Includes bibliographical references and index.},
	url = {http://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html}
}