Baglio, S <br/><br/>
Scaling issues and design of MEMS / 
 Scaling issues and design of microelectromechanical systems 
Salvatore Baglio, Salvatore Castorina, Nicoḷ Savalli. 
 - Chichester, West Sussex, England ;  Hoboken, NJ :  John Wiley & Sons,  c2007. 
 - xiii, 229 p. :  ill. ;  24 cm. 
<br/><br/> Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>9780470016992 047001699X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.