01314nam a2200289 a 4500 vtls000029413 KUKTEM 20251117145131.0 080611s2007 enka b 001 0 eng 9780470016992 047001699X 201107132024 VLOAD 200908141450 VLOAD 200908141421 VLOAD 200908131759 VLOAD 200806111433 norsaini UMP TK7875 .B34 2007 Baglio, S Scaling issues and design of MEMS / Salvatore Baglio, Salvatore Castorina, Nicolò Savalli. Scaling issues and design of microelectromechanical systems Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, c2007. xiii, 229 p. : ill. ; 24 cm. Includes bibliographical references and index. Microelectromechanical systems Design and construction. Castorina, Salvatore. Savalli, Nicol. Table of contents only http://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html Contributor biographical information http://www.loc.gov/catdir/enhancements/fy0834/2007037324-b.html 0 0 0 0 20000 20000 2019-09-04 431.60 0 TK7875 .B34 2007 0000033924 2019-09-04 00:00:00 1 431.60 2019-09-04 OPEN VIRTUA40 40054 40060 VTLSSORT0080*0200*0201*0400*0900*1000*2450*2460*2600*3000*5000*6500*7000*7001*8560*8561*9991