TY  - BOOK
AU  - Baglio,S
AU  - Castorina,Salvatore
AU  - Savalli,Nicol
TI  - Scaling issues and design of MEMS
SN  - 9780470016992
PY  - 2007///
CY  - Chichester, West Sussex, England, Hoboken, NJ
PB  - John Wiley & Sons
KW  - Microelectromechanical systems
KW  - Design and construction
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0810/2007037324-t.html
UR  - http://www.loc.gov/catdir/enhancements/fy0834/2007037324-b.html
ER  -