Engineering thin films and nanostructures with ion beams / 
 Engineering thin films and nanostructures with ion beams  [electronic resource] 
edited by Emile Knystautas 
 - Boca Raton, FL :  Taylor & Francis,  c2005 
 - 574 p. :  ill. ;  24 cm.  +  1 CD-ROM 
 - Optical engineering ;  v.92 .
 - Optical engineering (Marcel Dekker, Inc.) ;  v. 92. .
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>082472447X (alk. paper) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films<br/>Nanostructures<br/>Ion bombardment--Industrial applications