Reliability of MEMS :  testing of materials and devices / 
edited by Osamu Tabata and Toshiyuki Tsuchiya 
 - Weinheim  :  Wiley-VCH ,  c2008 
 - xx, 303 p. :  ill. ;  25 cm. 
 - Advanced micro & nanosystems  v.6 .
<br/><br/> "Testing of materials and devices"-- Cover 
<br/><br/>Includes bibliographical references and index 
<br/><br/><label>ISBN: </label>9783527314942 3527314946 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Reliablity