00740nam a2200217 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245010900120260003600229300003300265440003800298500004700336504005000383650004700433700001800480700002400498vtls000030165KUKTEM20251117145135.0080714t2008    gw da  f      001 0 eng d  a9783527314942  a3527314946  aUMP00aReliability of MEMS :btesting of materials and devices /cedited by Osamu Tabata and Toshiyuki Tsuchiya  aWeinheim  :bWiley-VCH ,cc2008  axx, 303 p. :bill. ;c25 cm. 0aAdvanced micro & nanosystemsvv.6  a"Testing of materials and devices"-- Cover  aIncludes bibliographical references and index 0aMicroelectromechanical systemsxReliablity1 aTabata, Osamu1 aTsuchiya, Toshiyuki