01031nam a2200265 a 4500 vtls000030165 KUKTEM 20251117145135.0 080714t2008 gw da f 001 0 eng d 9783527314942 3527314946 201107132030 VLOAD 200908141458 VLOAD 200908141429 VLOAD 200908131804 VLOAD 200807141026 saini UMP TK7875 .R45 2008 Reliability of MEMS : testing of materials and devices / edited by Osamu Tabata and Toshiyuki Tsuchiya Weinheim : Wiley-VCH , c2008 xx, 303 p. : ill. ; 25 cm. Advanced micro & nanosystems v.6 "Testing of materials and devices"-- Cover Includes bibliographical references and index Microelectromechanical systems Reliablity Tabata, Osamu Tsuchiya, Toshiyuki 0 0 0 0 20000 20000 2019-09-04 756.80 0 TK7875 .R45 2008 0000034520 2019-09-04 00:00:00 1 756.80 2019-09-04 OPEN VIRTUA40 40194 40200 VTLSSORT0080*0200*0201*0400*0900*2450*2600*3000*4400*5000*5040*6500*7000*7001*9991