TY  - BOOK
AU  - Tabata,Osamu
AU  - Tsuchiya,Toshiyuki
TI  - Reliability of MEMS: testing of materials and devices 
SN  - 9783527314942
PY  - 2008///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Microelectromechanical systems
KW  - Reliablity
N1  - "Testing of materials and devices"-- Cover; Includes bibliographical references and index
ER  -