Plasma synthesis and etching of electronic materials :  symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / 
editors by R. P. H. Chang, B. Abeles 
 - Pittsburgh, PA :  Materials Research Society,  c1985 
 - xv, 522 p. :  ill. ;  24 cm. 
 - Materials Research Society symposia proceedings ;  v. 38 .
 - Materials Research Society symposia proceedings .
<br/><br/>Includes bibliographies references and index 
<br/><br/><label>ISBN: </label>9780931837036 0931837030 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering--Congresses<br/>Plasma etching--Congresses<br/>Electronics--Materials--Congresses