00921nam a2200241 a 4500001001400000003000700014005001700021008004100038020001800079020001500097040000800112245016700120260005700287300003300344490006100377504004900438650003500487650003100522650003900553700002000592700001500612830005200627vtls000062533KUKTEM20251117145150.0120619t1985    paua   f b    001 0 eng d  a9780931837036  a0931837030  aUMP00aPlasma synthesis and etching of electronic materials :bsymposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /ceditors by R. P. H. Chang, B. Abeles  aPittsburgh, PA :bMaterials Research Society,cc1985  axv, 522 p. :bill. ;c24 cm.1 aMaterials Research Society symposia proceedings ;vv. 38  aIncludes bibliographies references and index 0aPlasma engineeringxCongresses 0aPlasma etchingxCongresses 0aElectronicsxMaterialsxCongresses1 aChang, R. P. H.1 aAbeles, B. 0aMaterials Research Society symposia proceedings