TY  - BOOK
AU  - Chang,R.P.H.
AU  - Abeles,B.
TI  - Plasma synthesis and etching of electronic materials: symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposia proceedings
SN  - 9780931837036
PY  - 1985///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Plasma engineering
KW  - Congresses
KW  - Plasma etching
KW  - Electronics
KW  - Materials
N1  - Includes bibliographies references and index
ER  -