TY  - BOOK
AU  - Desu,Seshu B.
AU  - Beach,David B.
AU  - Van Buskirk,Peter C.
TI  - Metal-organic chemical vapor deposition of electronic ceramics II: symposium held on November 27-29 1995, Boston, Massachusetts, U.S.A. 
T2  - Materials Research Society symposium proceedings
SN  - 9781558993181
PY  - 1996///
CY  - Pittsburgh, PA
PB  - Materials Research Society
KW  - Electronic ceramics
KW  - Congresses
KW  - Metal organic chemical vapor deposition
KW  - Thin films
N1  - Includes bibliographical references and index
ER  -