Ostrikov, Kostya <br/><br/>
Plasma nanoscience :  basic concepts and applications of deterministic nanofabrication / 
Kostya Ostrikov 
 - Weinheim :  Wiley-VCH,  2008 
 - 538 p. :  ill. ;  25 cm. 
<br/><br/><label>ISBN: </label>3527407405 9783527407408 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanostructured materials<br/>Plasma engineering<br/>Low temperature plasmas