TY  - BOOK
AU  - Ostrikov,Kostya
TI  - Plasma nanoscience: basic concepts and applications of deterministic nanofabrication 
SN  - 3527407405
PY  - 2008///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Nanostructured materials
KW  - Plasma engineering
KW  - Low temperature plasmas
ER  -