Irene, Eugene A. <br/><br/>
Surfaces, interfaces, and thin films for microelectronics / 
Eugene A. Irene. 
 - Hoboken, N.J. :  Wiley-Interscience,  c2008. 
 - xiii, 515 p. :  ill. ;  25 cm. 
<br/><br/>Includes bibliographical references and index. 
<br/><br/><label>ISBN: </label>0470174471 (cloth) 9780470174470 (cloth) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Surface chemistry.<br/>Interfaces (Physical sciences)<br/>Thin films.<br/>Microelectronics--Materials.