01215nam a2200289 a 4500 vtls000029279 KUKTEM 20251117145245.0 080604s2008 njua b 001 0 eng 0470174471 (cloth) 9780470174470 (cloth) 201107132058 VLOAD 200908141536 VLOAD 200908141507 VLOAD 200908132039 VLOAD 200806041441 norsaini UMP QD506 .I74 2008 Irene, Eugene A. Surfaces, interfaces, and thin films for microelectronics / Eugene A. Irene. Hoboken, N.J. : Wiley-Interscience, c2008. xiii, 515 p. : ill. ; 25 cm. Includes bibliographical references and index. Surface chemistry. Interfaces (Physical sciences) Thin films. Microelectronics Materials. Table of contents only http://www.loc.gov/catdir/toc/ecip0720/2007024692.html Contributor biographical information http://www.loc.gov/catdir/enhancements/fy0806/2007024692-b.html 0 0 0 0 10000 10000 2019-09-04 414.83 0 QD506 .I74 2008 0000033931 2019-09-04 00:00:00 1 414.83 2019-09-04 OPEN VIRTUA40 42511 42517 VTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5040*6500*6501*6502*6503*8560*8561*9991