TY  - BOOK
AU  - Irene,Eugene A.
TI  - Surfaces, interfaces, and thin films for microelectronics
SN  - 0470174471 (cloth)
PY  - 2008///
CY  - Hoboken, N.J.
PB  - Wiley-Interscience
KW  - Surface chemistry
KW  - Interfaces (Physical sciences)
KW  - Thin films
KW  - Microelectronics
KW  - Materials
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/toc/ecip0720/2007024692.html
UR  - http://www.loc.gov/catdir/enhancements/fy0806/2007024692-b.html
ER  -