@book{42557,
	author = {Gerlach, Gerald. and Dötzel, Wolfram.},
	title = {Introduction to microsystem technology :},
	publisher = {J. Wiley & Sons,},
	year = {c2008.},
	address = {Chichester, England ;},
	url = {http://www.loc.gov/catdir/enhancements/fy0806/2007050172-t.html}
}