Gerlach, Gerald. <br/><br/>
Introduction to microsystem technology :  a guide for students / 
Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller. 
 - Chichester, England ;  Hoboken, NJ :  J. Wiley & Sons,  c2008. 
 - xxiii, 351 p. :  ill. ;  26 cm. 
 - Wiley microsystem and nanotechnology series .
<br/><br/>Includes bibliographical references and index. 
<br/><br/><br/>Translated from the German. 
<br/><br/><label>ISBN: </label>0470058617 (cloth) 9780470058619 (cloth) 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems--Design and construction.<br/>System design.<br/>Microelectronics.