TY  - BOOK
AU  - Gerlach,Gerald
AU  - Dötzel,Wolfram
TI  - Introduction to microsystem technology: a guide for students 
SN  - 0470058617 (cloth)
PY  - 2008///
CY  - Chichester, England, Hoboken, NJ
PB  - J. Wiley & Sons
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - System design
KW  - Microelectronics
N1  - Includes bibliographical references and index
UR  - http://www.loc.gov/catdir/enhancements/fy0806/2007050172-t.html
ER  -