@book{43689,
	author = {Yoo, Chue San.},
	title = {Semiconductor manufacturing technology /},
	publisher = {World Scientific,},
	year = {c2008.},
	address = {Hackensack, N.J. ;},
	note = {Includes bibliographical references and index.},
	url = {http://www.loc.gov/catdir/toc/fy0804/2008299033.html}
}